Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6533521 | Integrated substrate handler having pre-aligner and storage pod access mechanism | Alexander Todorov | 2003-03-18 |
| 6435807 | Integrated edge gripper | Alexander Todorov | 2002-08-20 |
| 6297611 | Robot having independent end effector linkage motion | Alexander Todorov, Zlatko Sotirov | 2001-10-02 |