Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092245 | Chamber valve | — | 2021-08-17 |
| 10989343 | Push-to-connect and pull-to-disconnect quick coupling | — | 2021-04-27 |
| 10811236 | Magnetic anode for sputter magnetron cathode | Phong Ngo | 2020-10-20 |
| 10657932 | Tuning device for stringed musical instrument | — | 2020-05-19 |
| 10273570 | Rotary magnetron magnet bar and apparatus containing the same for high target utilization | Patrick Lawrence Morse, Phong Ngo | 2019-04-30 |
| 10134557 | Linear anode layer slit ion source | — | 2018-11-20 |
| 9388490 | Rotary magnetron magnet bar and apparatus containing the same for high target utilization | Patrick Lawrence Morse, Phong Ngo | 2016-07-12 |
| 9136086 | Closed drift magnetic field ion source apparatus containing self-cleaning anode and a process for substrate modification therewith | — | 2015-09-15 |
| 9103018 | Sputtering target temperature control utilizing layers having predetermined emissivity coefficients | Mark George | 2015-08-11 |
| 8535490 | Rotatable magnetron sputtering with axially movable target electrode tube | Patrick Lawrence Morse | 2013-09-17 |
| 8304744 | Closed drift ion source | — | 2012-11-06 |
| 7993496 | Cylindrical target with oscillating magnet for magnetron sputtering | Klaus Hartig, Steve E. Smith | 2011-08-09 |
| 7932678 | Magnetic mirror plasma source and method using same | — | 2011-04-26 |
| 7411352 | Dual plasma beam sources and method | — | 2008-08-12 |
| 7327089 | Beam plasma source | — | 2008-02-05 |
| 7294283 | Penning discharge plasma source | — | 2007-11-13 |
| 7259378 | Closed drift ion source | — | 2007-08-21 |
| 7038389 | Magnetron plasma source | — | 2006-05-02 |
| 7025833 | Apparatus and method for web cooling in a vacuum coating chamber | — | 2006-04-11 |
| 7023128 | Dipole ion source | — | 2006-04-04 |
| 6919672 | Closed drift ion source | — | 2005-07-19 |
| 6911779 | Magnetic mirror plasma source | — | 2005-06-28 |
| 4949927 | Articulable column | Thomas M. Young | 1990-08-21 |
| 4850806 | Controlled by-pass for a booster pump | Steven V. Morgan | 1989-07-25 |
| 4753417 | Gate valve for vacuum processing apparatus | Alex Boozenny | 1988-06-28 |