| 11092245 |
Chamber valve |
— |
2021-08-17 |
| 10989343 |
Push-to-connect and pull-to-disconnect quick coupling |
— |
2021-04-27 |
| 10811236 |
Magnetic anode for sputter magnetron cathode |
Phong Ngo |
2020-10-20 |
| 10657932 |
Tuning device for stringed musical instrument |
— |
2020-05-19 |
| 10273570 |
Rotary magnetron magnet bar and apparatus containing the same for high target utilization |
Patrick Lawrence Morse, Phong Ngo |
2019-04-30 |
| 10134557 |
Linear anode layer slit ion source |
— |
2018-11-20 |
| 9388490 |
Rotary magnetron magnet bar and apparatus containing the same for high target utilization |
Patrick Lawrence Morse, Phong Ngo |
2016-07-12 |
| 9136086 |
Closed drift magnetic field ion source apparatus containing self-cleaning anode and a process for substrate modification therewith |
— |
2015-09-15 |
| 9103018 |
Sputtering target temperature control utilizing layers having predetermined emissivity coefficients |
Mark George |
2015-08-11 |
| 8535490 |
Rotatable magnetron sputtering with axially movable target electrode tube |
Patrick Lawrence Morse |
2013-09-17 |
| 8304744 |
Closed drift ion source |
— |
2012-11-06 |
| 7993496 |
Cylindrical target with oscillating magnet for magnetron sputtering |
Klaus Hartig, Steve E. Smith |
2011-08-09 |
| 7932678 |
Magnetic mirror plasma source and method using same |
— |
2011-04-26 |
| 7411352 |
Dual plasma beam sources and method |
— |
2008-08-12 |
| 7327089 |
Beam plasma source |
— |
2008-02-05 |
| 7294283 |
Penning discharge plasma source |
— |
2007-11-13 |
| 7259378 |
Closed drift ion source |
— |
2007-08-21 |
| 7038389 |
Magnetron plasma source |
— |
2006-05-02 |
| 7025833 |
Apparatus and method for web cooling in a vacuum coating chamber |
— |
2006-04-11 |
| 7023128 |
Dipole ion source |
— |
2006-04-04 |
| 6919672 |
Closed drift ion source |
— |
2005-07-19 |
| 6911779 |
Magnetic mirror plasma source |
— |
2005-06-28 |
| 4949927 |
Articulable column |
Thomas M. Young |
1990-08-21 |
| 4850806 |
Controlled by-pass for a booster pump |
Steven V. Morgan |
1989-07-25 |
| 4753417 |
Gate valve for vacuum processing apparatus |
Alex Boozenny |
1988-06-28 |