Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7101789 | Method of wet etching vias and articles formed thereby | Kanakasabapathi Subramanian, Jeffrey Fortin | 2006-09-05 |
| 7037746 | Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane | Lowell Scott Smith, David Martin Mills, Jeffrey Fortin, John Logan | 2006-05-02 |
| 6914220 | Microelectromechanical heating apparatus and fluid preconcentrator device utilizing same | Stella W. Pang, Edward T. Zellers | 2005-07-05 |