Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6678143 | Electrostatic chuck and method of manufacturing the same | Shinsuke Masuda | 2004-01-13 |
| 5932644 | Chlorine-containing resin with LI hydroxide (monohydrate) or LI carbonate | — | 1999-08-03 |