Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12168234 | Method of producing inorganic material and apparatus of producing inorganic material | Yoshitaka Sakairi, Haruo Sunakawa | 2024-12-17 |
| 10741380 | Method for washing semiconductor manufacturing apparatus component, apparatus for washing semiconductor manufacturing apparatus component, and vapor phase growth apparatus | Masashi Mizuta, Yutaka Nishikori | 2020-08-11 |