Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8538131 | Defect inspection apparatus and method of defect inspection | Naohiro Takahashi | 2013-09-17 |
| 7948618 | Defect inspection method and apparatus with a threshold value determination | Naohiro Takahashi, Tadamasa Noguchi | 2011-05-24 |
| 7755753 | Defect inspection apparatus, sensitivity calibration method for the same, substrate for defect detection sensitivity calibration, and manufacturing method thereof | Naohiro Takahashi | 2010-07-13 |