Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8507377 | Semiconductor device, method of manufacturing the same, and phase shift mask | Kenichi Watanabe, Michiari Kawano, Kazuo Sukegawa, Takumi Hasegawa, Toyoji Sawada | 2013-08-13 |
| 7755169 | Semiconductor device, method of manufacturing the same, and phase shift mask | Kenichi Watanabe, Michiari Kawano, Kazuo Sukegawa, Takumi Hasegawa, Toyoji Sawada | 2010-07-13 |
| 7498659 | Semiconductor device, method of manufacturing the same, and phase shift mask | Kenichi Watanabe, Michiari Kawano, Kazuo Sukegawa, Takumi Hasegawa, Toyoji Sawada | 2009-03-03 |
| 7129565 | Semiconductor device, method of manufacturing the same, and phase shift mask | Kenichi Watanabe, Michiari Kawano, Kazuo Sukegawa, Takumi Hasegawa, Toyoji Sawada | 2006-10-31 |