Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7906033 | Plasma etching method and apparatus | Minoru Suzuki, Koji Ibi, Genichi Komuro, Yoichi Okita | 2011-03-15 |
| 6926800 | Plasma etching method and apparatus | Minoru Suzuki, Koji Ibi, Genichi Komuro, Yoichi Okita | 2005-08-09 |