Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4449037 | Method and apparatus for heating semiconductor wafers | Hideo Onodera, Tadashi Kiriseko | 1984-05-15 |
YS
Yoshiyuki Shibamata
Overall (All Time): #4,034,531 of 4,157,543Top 100%
1
Patents All Time