Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6968531 | Exposure method utilizing optical proximity corrected exposure patterns, an apparatus for generating optical proximity corrected exposure data, and an exposure apparatus for optical proximity corrected exposure data | Ryuji Kobayashi, Takahisa Ito | 2005-11-22 |
| 6807654 | Method of and device for detecting pattern, method of and device for checking pattern, method of and device for correcting and processing pattern, and computer product | Satoshi Akutagawa | 2004-10-19 |
| 6635392 | Data processing apparatus, method and program product for compensating for photo proximity effect with reduced data amount, and photomask fabricated using same | Tomoyuki Okada, Kazuhiko Takahashi, Masahiko Minemura | 2003-10-21 |
| 6444483 | Method and apparatus of producing partial-area mask data files | Masahiko Minemura, Tomoyuki Okada, Ryo Tsujimura, Kenji Kikuchi | 2002-09-03 |