Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8223403 | Inspection apparatus, inspection method and manufacturing method of mask for exposure, and mask for exposure | Mitsufumi Naoe | 2012-07-17 |
| 7664309 | Reticle inspecting apparatus and reticle inspecting method | Yuichi Tokumaru | 2010-02-16 |
| 7511817 | Reticle, reticle inspection method and reticle inspection apparatus | — | 2009-03-31 |
| 7424145 | Device and method for inspecting photomasks and products fabricated using the same | Kazutoshi Ohta | 2008-09-09 |
| 6745484 | Reticle, and pattern positional accuracy measurement device and method | Kazutoshi Ohta | 2004-06-08 |
| 6708323 | Method and apparatus for verifying mask pattern data according to given rules | Kazutoshi Ohta | 2004-03-16 |