Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8581249 | Film thickness monitoring structure for semiconductor substrate | Kouichi Nagai | 2013-11-12 |
| 8513130 | Semiconductor substrate and method of fabricating semiconductor device | — | 2013-08-20 |
| 7915172 | Semiconductor substrate and method of fabricating semiconductor device | — | 2011-03-29 |
| 7652377 | Semiconductor device and manufacturing method of the same | Kouichi Nagai | 2010-01-26 |
| 7642103 | Method of fabricating semiconductor device | — | 2010-01-05 |
| 7598522 | Semiconductor substrate and production process thereof | Kouichi Nagai | 2009-10-06 |
| 7405025 | Reticle and method of fabricating semiconductor device | — | 2008-07-29 |
| 7332357 | Method for fabricating semiconductor device | Yuriko Kokubun | 2008-02-19 |
| 7232764 | Semiconductor device fabrication method | — | 2007-06-19 |
| 7160737 | Method for fabricating semiconductor device | — | 2007-01-09 |
| 7115994 | Semiconductor substrate and method of fabricating semiconductor device | — | 2006-10-03 |