Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4569068 | X-Ray Lithography apparatus | Mitsuru Ikeda, Mitsunori Suzuki | 1986-02-04 |
| 4214163 | Method and apparatus for correcting astigmatism in a scanning electron microscope or the like | Takao Namae | 1980-07-22 |