Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6376338 | Manufacturing method of a semiconductor device having a diffraction grating | Mitsuru Ekawa, Yuji Kotaki, Manabu Matsuda | 2002-04-23 |
| 6238943 | Optical semiconductor device and a method of manufacturing the same | Hirohiko Kobayashi, Mitsuru Ekawa, Nirou Okazaki, Shouichi Ogita, Haruhisa Soda +1 more | 2001-05-29 |
| 6034983 | Method of fabricating compound semiconductor device and optical semiconductor device | Mitsuru Ekawa, Tsuyoshi Yamamoto, Hirohiko Kobayashi | 2000-03-07 |
| 5987046 | Optical semiconductor device and a method of manufacturing the same | Hirohiko Kobayashi, Mitsuru Ekawa, Nirou Okazaki, Shouichi Ogita, Haruhisa Soda +1 more | 1999-11-16 |
| 5952673 | Optical semiconductor device including a multiple quantum well structure of an AlGaInAs/InP system | Toshio Higashi | 1999-09-14 |
| 5937273 | Fabricating compound semiconductor by varying ratio of stagnant layer thickness and mean free path of seed material | Mitsuru Ekawa, Tsuyoshi Yamamoto, Hirohiko Kobayashi | 1999-08-10 |
| 5327450 | Optical semiconductor device and process of prodcuing same | — | 1994-07-05 |
| 4980204 | Metal organic chemical vapor deposition method with controlled gas flow rate | Susumu Yamazaki | 1990-12-25 |