Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5567661 | Formation of planarized insulating film by plasma-enhanced CVD of organic silicon compound | Hidetoshi Nishio, Yumiko Hamada, Hiroyuki Uesugi | 1996-10-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5567661 | Formation of planarized insulating film by plasma-enhanced CVD of organic silicon compound | Hidetoshi Nishio, Yumiko Hamada, Hiroyuki Uesugi | 1996-10-22 |