Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6040198 | Element concentration measuring method and apparatus, and semiconductor device fabrication method and apparatus | Satoshi Komiya, Naoki Awaji | 2000-03-21 |
| 5740226 | Film thickness measuring and film forming method | Satoshi Komiya, Naoki Awaji | 1998-04-14 |
| 5003370 | High power frequency semiconductor device with improved thermal resistance | — | 1991-03-26 |
| 4571611 | Semiconductor chip with a metal heat radiator | — | 1986-02-18 |