Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7513981 | Manufacturing apparatus of semiconductor device | Kazutaka Miura | 2009-04-07 |
| 5395453 | Apparatus and method for controlling oscillation output of magnetron | — | 1995-03-07 |