Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5012523 | Dimension checking method | Kenichi Kobayashi | 1991-04-30 |
| 4809341 | Test method and apparatus for a reticle or mask pattern used in semiconductor device fabrication | Kenichi Kobayashi | 1989-02-28 |
| 4790023 | Method for measuring dimensions of fine pattern | Kenichi Kobayashi | 1988-12-06 |
| 4603974 | Reticle used in semiconductor device fabrication and a method for inspecting a reticle pattern thereon | — | 1986-08-05 |
| 4527070 | Method and apparatus for inspecting a pattern | Yoshimitu Mashima, Kenichi Kobayashi | 1985-07-02 |