Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5225355 | Gettering treatment process | Yasuo Nara, Takashi Ito | 1993-07-06 |
| 5221423 | Process for cleaning surface of semiconductor substrate | Takashi Ito | 1993-06-22 |
| 5178721 | Process and apparatus for dry cleaning by photo-excited radicals | — | 1993-01-12 |