Issued Patents All Time
Showing 76–97 of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7038830 | Micro-oscillation element | Norinao Kouma, Hisao Okuda, Hiromitsu Soneda, Satoshi Ueda, Ippei Sawaki +1 more | 2006-05-02 |
| 7033515 | Method for manufacturing microstructure | Norinao Kouma, Yoshihiro Mizuno, Hisao Okuda, Hiromitsu Soneda, Satoshi Ueda +2 more | 2006-04-25 |
| 7031041 | Micro-oscillating element provided with torsion bar | Xiaoyu Mi, Satoshi Ueda, Ippei Sawaki | 2006-04-18 |
| 6969629 | Method for manufacturing micro-structural unit | Norinao Kouma, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda +2 more | 2005-11-29 |
| 6946398 | Method for fabricating a micro machine | Shoji Okuda, Hiroshi Tokunaga | 2005-09-20 |
| 6936510 | Semiconductor device with self-aligned contact and its manufacture | Kazuo Itabashi, Yuji Yokoyama, Kenichi Inoue, Koichi Hashimoto, Wataru Futo | 2005-08-30 |
| 6921693 | Semiconductor device and process for fabricating the same | Tomohiko Tsutsumi, Kazutaka Yoshizawa | 2005-07-26 |
| 6891650 | Micromirror unit fabrication method and micromirror unit made by the same | Yoshihiro Mizuno, Satoshi Ueda, Ippei Sawaki, Hisao Okuda, Fumio Yamagishi +1 more | 2005-05-10 |
| 6887396 | Micromirror unit and method of making the same | Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki, Fumio Yamagishi | 2005-05-03 |
| 6881649 | Method of making device chips collectively from common material substrate | Norinao Kouma, Yoshihiro Mizuno, Hisao Okuda, Ippei Sawaki, Yoshitaka Nakamura | 2005-04-19 |
| 6817725 | Micro mirror unit and method of making the same | Yoshihiro Mizuno, Satoshi Ueda, Ippei Sawaki, Hisao Okuda, Norinao Kouma +2 more | 2004-11-16 |
| 6806992 | Micro mirror unit including mirror substrate and wiring substrate spaced by conductive spacer | Hiromitsu Soneda, Satoshi Ueda, Hisao Okuda, Ippei Sawaki, Yoshihiro Mizuno +3 more | 2004-10-19 |
| 6795225 | Micromirror unit with torsion connector having nonconstant width | Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki, Hisao Okuda | 2004-09-21 |
| 6723659 | Micromirror unit fabrication method and micromirror unit made by the same | Yoshihiro Mizuno, Satoshi Ueda, Ippei Sawaki, Hisao Okuda, Fumio Yamagishi +1 more | 2004-04-20 |
| 6620674 | Semiconductor device with self-aligned contact and its manufacture | Kazuo Itabashi, Yuji Yokoyama, Kenichi Inoue, Koichi Hashimoto, Wataru Futo | 2003-09-16 |
| 6522003 | Semiconductor device and method of manufacturing the same | Takayoshi Minami, Toshimi Ikeda, Masato Matsumiya, Kuninori Kawabata | 2003-02-18 |
| 6459112 | Semiconductor device and process for fabricating the same | Tomohiko Tsutsumi, Kazutaka Yoshizawa | 2002-10-01 |
| 6420229 | Method for fabricating a cylindrical capacitor in which a storage electrode is formed on both the upper and side surfaces of a conductor plug | — | 2002-07-16 |
| 6285045 | Semiconductor device with self-aligned contact and its manufacture | Kazuo Itabashi, Yuji Yokoyama, Kenichi Inoue, Koichi Hashimoto, Wataru Futo | 2001-09-04 |
| 6207988 | Semiconductor device and method for fabricating the same | — | 2001-03-27 |
| 5801081 | Semiconductor device and method of manufacturing semiconductor device | Suguru Warashina | 1998-09-01 |
| 5698885 | Semiconductor device and method of manufacturing semiconductor device | Suguru Warashina | 1997-12-16 |