Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7883823 | Photomask and method for manufacturing a semiconductor device using the photomask | — | 2011-02-08 |
| 7803500 | Photomask, photomask fabrication method, and semiconductor device fabrication method | — | 2010-09-28 |
| 7713664 | Method for fabricating an attenuated phase shift photomask by separate patterning of negative and positive resist layers with corresponding etching steps for underlying light-shielding and phase shift layers on a transparent substrate | — | 2010-05-11 |
| 7678510 | Mask for exposure and method of manufacturing the same | Koji Hosono | 2010-03-16 |
| 7279259 | Method for correcting pattern data and method for manufacturing semiconductor device using same | Takahisa Ito, Mitsuo Sakurai, Yasuyuki Kushida | 2007-10-09 |
| 6372392 | Transparent optical device and fabrication method thereof | Eiichi Hoshino, Masanori Onodera, Kazumasa Doi, Mitsufumi Naoe | 2002-04-16 |