Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5488925 | Gas handling device assembly used for a CVD apparatus | — | 1996-02-06 |
| 5405445 | Vacuum extraction system for chemical vapor deposition reactor vessel and trapping device incorporated therein | Koichi Nakagawa | 1995-04-11 |