Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5561299 | X-Y stage and charged particle beam exposure apparatus | Kazushi Ishida, Tooru Ikeda | 1996-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5561299 | X-Y stage and charged particle beam exposure apparatus | Kazushi Ishida, Tooru Ikeda | 1996-10-01 |