Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4413186 | Method for detecting a position of a micro-mark on a substrate by using an electron beam | — | 1983-11-01 |
| 4291231 | Electron beam exposure system and an apparatus for carrying out the same | Kenichi Kawashima, Hiroshi Yasuda | 1981-09-22 |