Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7039889 | Apparatus, method, and program for designing a mask and method for fabricating semiconductor devices | Kazuhiko Takahashi, Masahiko Minemura, Mitsuo Sakurai | 2006-05-02 |
| 6800428 | Wavelength-independent exposure pattern generation method and exposure pattern generation system for lithography | Tomoyuki Okada, Taketoshi Omata, Kiyokazu Aiso, Masao Sugiyama, Tomoaki Kawaguchi | 2004-10-05 |