Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8854613 | Surface defect inspection apparatus and surface defect inspection method | — | 2014-10-07 |
| 7633602 | Measurement apparatus and measurement method | Hidetoshi Ohba | 2009-12-15 |
| 4547895 | Pattern inspection system | Kikuo Mita, Masayuki Oyama, Takashi Yoshida, Masato Nakashima, Tadao Nakakuki | 1985-10-15 |
| 4392120 | Pattern inspection system | Kikuo Mita, Masayuki Oyama, Takashi Yoshida, Masato Nakashima, Tadao Nakakuki | 1983-07-05 |