Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7022575 | Manufacturing method of semiconductor device | Kazuo Okada, Tomonori Mori, Hiroyuki Dobashi, Hiroyuki Suzuki, Takayoshi Honda +1 more | 2006-04-04 |
| 6987062 | Manufacturing method of semiconductor device | Kazuo Okada | 2006-01-17 |
| 5756401 | Process for the etching of polycide film | — | 1998-05-26 |
| 5487811 | Process for preparation of semiconductor device | — | 1996-01-30 |
| 5472564 | Method of dry etching with hydrogen bromide or bromide | Moritaka Nakamura, Takashi Kurimoto | 1995-12-05 |
| 5316616 | Dry etching with hydrogen bromide or bromine | Moritaka Nakamura, Takashi Kurimoto | 1994-05-31 |