Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4948983 | Alignment of mask and semiconductor wafer using linear fresnel zone plate | Shigeru Maruyama, Shunsuke Fueki, Takashi Kiuchi | 1990-08-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4948983 | Alignment of mask and semiconductor wafer using linear fresnel zone plate | Shigeru Maruyama, Shunsuke Fueki, Takashi Kiuchi | 1990-08-14 |