Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7536068 | Micro movable element and optical switching device | Hiromitsu Soneda, Xiaoyu Mi, Osamu Tsuboi, Norinao Kouma, Satoshi Ueda | 2009-05-19 |
| 7473981 | Electronic component | Tsuyoshi Matsumoto, Yoshihiro Mizuno, Xiaoyu Mi, Satoshi Ueda | 2009-01-06 |
| 7459331 | Micro mirror unit and method of making the same | Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Norinao Kouma +2 more | 2008-12-02 |
| 7411714 | Micromirror unit with torsion connector having nonconstant width | Osamu Tsuboi, Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki | 2008-08-12 |
| 7324251 | Micro-actuation element provided with torsion bars | Osamu Tsuboi, Yoshihiro Mizuno, Satoshi Ueda, Ippei Sawaki, Fumio Yamagishi +2 more | 2008-01-29 |
| 7262541 | Micro-oscillation element incorporating springs | Mi Xiaoyu, Satoshi Ueda, Osamu Tsuboi, Hiromitsu Soneda, Norinao Kouma +2 more | 2007-08-28 |
| 7192879 | Method for manufacturing micro-structural unit | Norinao Kouma, Osamu Tsuboi, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda +2 more | 2007-03-20 |
| 7161274 | Micro-oscillation element having two rotational axes that are non-orthogonal to each other | Osamu Tsuboi, Norinao Kouma, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda +2 more | 2007-01-09 |
| 7145712 | Micro mirror unit and method of making the same | Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Norinao Kouma +2 more | 2006-12-05 |
| 7130099 | Micromirror unit with torsion connector having nonconstant width | Osamu Tsuboi, Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki | 2006-10-31 |
| 7038830 | Micro-oscillation element | Osamu Tsuboi, Norinao Kouma, Hiromitsu Soneda, Satoshi Ueda, Ippei Sawaki +1 more | 2006-05-02 |
| 7033515 | Method for manufacturing microstructure | Norinao Kouma, Yoshihiro Mizuno, Osamu Tsuboi, Hiromitsu Soneda, Satoshi Ueda +2 more | 2006-04-25 |
| 6969629 | Method for manufacturing micro-structural unit | Norinao Kouma, Osamu Tsuboi, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda +2 more | 2005-11-29 |
| 6891650 | Micromirror unit fabrication method and micromirror unit made by the same | Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Fumio Yamagishi +1 more | 2005-05-10 |
| 6881649 | Method of making device chips collectively from common material substrate | Norinao Kouma, Yoshihiro Mizuno, Ippei Sawaki, Osamu Tsuboi, Yoshitaka Nakamura | 2005-04-19 |
| 6817725 | Micro mirror unit and method of making the same | Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Norinao Kouma +2 more | 2004-11-16 |
| 6806992 | Micro mirror unit including mirror substrate and wiring substrate spaced by conductive spacer | Hiromitsu Soneda, Satoshi Ueda, Ippei Sawaki, Osamu Tsuboi, Yoshihiro Mizuno +3 more | 2004-10-19 |
| 6795225 | Micromirror unit with torsion connector having nonconstant width | Osamu Tsuboi, Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki | 2004-09-21 |
| 6723659 | Micromirror unit fabrication method and micromirror unit made by the same | Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Fumio Yamagishi +1 more | 2004-04-20 |
| 6262827 | Galvano-mirror | Satoshi Ueda | 2001-07-17 |