Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746195 | Semiconductor transfer and manufacturing apparatus | — | 2004-06-08 |
| 6186722 | Chamber apparatus for processing semiconductor devices | — | 2001-02-13 |
| 4872964 | Planar magnetron sputtering apparatus and its magnetic source | Masafumi Suzuki | 1989-10-10 |