Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4968893 | Scanning electron beam exposure system | Hiroshi Yasuda, Takayuki Miyazaki | 1990-11-06 |
| 4585943 | Electron beam exposure apparatus | Hiroshi Yasuda | 1986-04-29 |
| 4586141 | Method and apparatus for an electron beam exposure system | Hiroshi Yasuda, Junichi Kai, Koichi Kobayashi | 1986-04-29 |
| 4583077 | Deflection system in an electron beam exposure device | Hiroshi Yasuda | 1986-04-15 |
| 4516030 | Scanning electron beam exposure system | Junichi Kai | 1985-05-07 |