Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8577494 | Semiconductor manufacturing apparatus and control system and control method therefor | Kazuhiro Miwa, Kazuhiro Watanabe | 2013-11-05 |
| 7908025 | Semiconductor manufacturing apparatus and control system and control method therefor | Kazuhiro Miwa, Kazuhiro Watanabe | 2011-03-15 |
| 5409540 | Chemical vapor phase growth method and chemical vapor phase growth apparatus | — | 1995-04-25 |
| 5298278 | Chemical vapor phase growth method and chemical vapor phase growth apparatus | — | 1994-03-29 |