Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4770680 | Wafer carrier for a semiconductor device fabrication, having means for sending clean air stream to the wafers stored therein | Akira Machida | 1988-09-13 |
| 4426657 | Semiconductor device and method for producing same | Masahiro Sugimoto, Juro Inomata | 1984-01-17 |