Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7000454 | Particle measurement configuration and semiconductor wafer processing device with such a configuration | Claus Schneider, Lothar Pfitzner, Heinz Schmid | 2006-02-21 |
| 6928892 | Configuration for determining a concentration of contaminating particles in a loading and unloading chamber of an appliance for processing at least one disk-like object | Olaf Storbeck, Lothar Pfitzner, Claus Schneider | 2005-08-16 |