HF

Heinrich Friedhelm

Fraunhofer: 2 patents #1,111 of 4,748Top 25%
Overall (All Time): #2,285,960 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
5406080 Process for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the same 1995-04-11
5319197 Process for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the same 1994-06-07