Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7259080 | Glass-type planar substrate, use thereof, and method for the production thereof | Arne Schulz, Peter Merz | 2007-08-21 |
| 6951119 | Method for producing micromechanical and micro-optic components consisting of glass-type materials | Peter Merz, Arne Schulz | 2005-10-04 |
| 6804107 | Tunable high-frequency capacitor | Xihe Tuo, Bernd Wagner | 2004-10-12 |
| 6748804 | Microsensor for measuring the position of liquids in capillaries | Thomas Lisec, Bernd Wagner | 2004-06-15 |
| 6700299 | Assembly having variable capacitance | Bernd Wagner, Beatrice Wenk | 2004-03-02 |
| 6684638 | Microactuator arrangement | Bernd Wagner | 2004-02-03 |
| 6168395 | Bistable microactuator with coupled membranes | Bernd Wagner | 2001-01-02 |
| 5938911 | Process for producing glass coatings for anodic bonding purposes | Carola Dell | 1999-08-17 |
| 5681024 | Microvalve | Thomas Lisec, Bernd Wagner | 1997-10-28 |
| 5407856 | Direct substrate bonding | Wolfgang Benecke | 1995-04-18 |