Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5614248 | Method for plasma-assisted reactive electron beam vaporization | Siegfried Schiller, Manfred Neumann, Volker Kirchhoff, Nicolas Schiller, Klaus Goedicke | 1997-03-25 |