Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8186225 | MEMS vacuum sensor based on the friction principle | Steffen Kurth, Karla Hiller, Christian Kaufmann, Thomas Gessner, Wolfram Doetzel | 2012-05-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8186225 | MEMS vacuum sensor based on the friction principle | Steffen Kurth, Karla Hiller, Christian Kaufmann, Thomas Gessner, Wolfram Doetzel | 2012-05-29 |