Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428720 | Method for producing layers with improved uniformity in coating systems with horizontally rotating substrate guiding | Michael Vergöhl, Stefan Bruns, Tobias Zickenrott | 2025-09-30 |
| 12421592 | Device and method for coating substrates having planar or shaped surfaces by means of magnetron sputtering | Michael Vergöhl, Stefan Bruns, Andre Kaiser, Thomas Melzig, Tobias Zickenrott | 2025-09-23 |
| 12258661 | Device and method for producing layers with improved uniformity in coating systems with horizontally rotating substrate and additional plasma sources | Michael Vergöhl, Tobias Zickenrott, Stefan Bruns | 2025-03-25 |
| 7763150 | Method and device for magnetron sputtering | Bernd Szyszka | 2010-07-27 |