WV

Wilhelm Vach

FE Fraunhofer-Gesellschaft E.V.: 1 patents #8 of 28Top 30%
SA Siemens Aktiengesellschaft: 1 patents #10,653 of 22,248Top 50%
Overall (All Time): #3,934,893 of 4,157,543Top 95%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
4856037 Arrangement for exposing semiconductor wafers by means of a synchrotron radiation in lithographic equipment Karl-Heinz Mueller, Hans Betz, Johann Krenner 1989-08-08