Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4856037 | Arrangement for exposing semiconductor wafers by means of a synchrotron radiation in lithographic equipment | Karl-Heinz Mueller, Hans Betz, Johann Krenner | 1989-08-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4856037 | Arrangement for exposing semiconductor wafers by means of a synchrotron radiation in lithographic equipment | Karl-Heinz Mueller, Hans Betz, Johann Krenner | 1989-08-08 |