Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7506609 | System for generating a local electron-cyclotron microwave low-pressure plasma at a predetermined location within a processing chamber | Sven Ulrich, Michael Stüber, Harald Leiste, Konrad Sell, Martina Lattemann +1 more | 2009-03-24 |