Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5476838 | Process for producing thin layers by means of reactive cathode sputtering and apparatus for implementing the process | Roger Wordenweber, Ursus Krüger | 1995-12-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5476838 | Process for producing thin layers by means of reactive cathode sputtering and apparatus for implementing the process | Roger Wordenweber, Ursus Krüger | 1995-12-19 |