Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8425793 | Process and device for cleaning and etching a substrate with a transparent conductive oxide layer | Joachim Müller, Hildegard Siekmann, Bernd Rech, Tobias Repmann, Wolfgang Apenzeller +1 more | 2013-04-23 |