Issued Patents All Time
Showing 176–178 of 178 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6528341 | Method of forming a sion antireflection film which is noncontaminating with respect to deep-uv photoresists | Frederic Gaillard | 2003-03-04 |
| 6387808 | Method of correcting topographical effects on a micro-electronic substrate | Andre Schiltz, Maryse Paoli, Alain Prola | 2002-05-14 |
| 6171973 | Process for etching the gate in MOS technology using a SiON-based hard mask | Frederic Gaillard | 2001-01-09 |