Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8652341 | Method and apparatus for structuring components made of a material composed of silicon oxide | Thomas Gessner, Andreas Bertz, Reinhard Schubert, Thomas Werner, Wolfgang Hentsch +1 more | 2014-02-18 |
| 8021515 | Inductively coupled plasma processing apparatus | Pascal Colpo, François Rossi | 2011-09-20 |