Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7448277 | Capacitive pressure sensor and method therefor | Bishnu Prasanna Gogoi | 2008-11-11 |
| 6985271 | Pointing angle control of electrostatic micro mirrors | Carlos H. Mastrangelo | 2006-01-10 |
| 6958850 | Pointing angle control of electrostatic micro mirrors with modified sliding mode control algorithm for precision control | Harshad S. Sane, Carlos H. Mastrangelo | 2005-10-25 |
| 6718605 | Single-side microelectromechanical capacitive accelerometer and method of making same | Khalil Najafi, Arvind S. Salian | 2004-04-13 |
| 6402968 | Microelectromechanical capactive accelerometer and method of making same | Khalil Najafi | 2002-06-11 |
| 6286369 | Single-side microelectromechanical capacitive acclerometer and method of making same | Khalil Najafi | 2001-09-11 |
| 6167757 | Single-side microelectromechanical capacitive accelerometer and method of making same | Khalil Najafi | 2001-01-02 |
| 6035714 | Microelectromechanical capacitive accelerometer and method of making same | Khalil Najafi | 2000-03-14 |