Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7128559 | Programmable imprint lithography template | Albert Alec Talin | 2006-10-31 |
| 6368942 | Method for fabricating an ultra-low expansion mask blank having a crystalline silicon layer | — | 2002-04-09 |
| 6210986 | Microfluidic channel fabrication method | Don W. Arnold, Joseph S. Schoeniger | 2001-04-03 |
| 6015640 | Mask fabrication process | — | 2000-01-18 |