Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9493875 | Shower head unit and chemical vapor deposition apparatus | — | 2016-11-15 |
| 8876976 | Chemical vapor deposition apparatus for equalizing heating temperature | — | 2014-11-04 |
| 8585823 | CVD apparatus having a rotating heater | — | 2013-11-19 |
| 8030597 | Partition-type heating apparatus | — | 2011-10-04 |
| 7326438 | Method for depositing nitride film using chemical vapor deposition apparatus of single chamber type | — | 2008-02-05 |