Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8993056 | Method of gas distribution and nozzle design in the improved chemical vapor deposition of polysilicon reactor | Vithal Revankar | 2015-03-31 |
| 8657958 | CVD-Siemens monosilane reactor process with complete utilization of feed gases and total recycle | Vithal Revankar | 2014-02-25 |
| 8399072 | Process for improved chemcial vapor deposition of polysilicon | Vithal Revankar | 2013-03-19 |
| 8124039 | Process of silicon tetrafluoride gas synthesis | Vithal Revankar | 2012-02-28 |
| 7897125 | Silicon tetrafluoride byproduct separation process | Vithal Revankar | 2011-03-01 |
| 5295581 | Process for preparing dry sodium aluminum hydride | — | 1994-03-22 |