Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8599366 | Method and device for determining a deformation of a disk-shaped workpiece, particularly a mold wafer | — | 2013-12-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8599366 | Method and device for determining a deformation of a disk-shaped workpiece, particularly a mold wafer | — | 2013-12-03 |